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平面镜和平面镜安装底座

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Plane mirror in Renishaw mountsTo complete an RLE interferometer system requires only one additional, external optical component fitted to each motion system axis. (When using the differential interferometer, optics are required on the motion system and a fixed reference point e.g. column or tool.)

RLE systems containing retroreflector configured detector heads already contain the necessary retroreflector target optic(s).

For applications that use a standard double pass or differential interferometer configuration, Renishaw can, if requested, supply plane mirror optics and adjustable mirror mounts.

Plane mirrors

Plane mirror with mounting locationsRenishaw supplied plane mirrors are manufactured on a Zerodur® (or similar) substrate and have a hard oxide dielectric coating.

Summary plane mirror specification

 Local flatness  < λ/10 over area 12 mm wide x 7 mm high
 Total flatness  λ/10
 Mirror coating  Hard oxide dielectric
 Reflectivity  > 97%
 Operating temperature  0 °C to 40 °C
 Cross section  25 mm x 25 mm
 Optical aperture  60 mm to 300 mm (10 mm increments)

Mirror mounts

Renishaw RAM10 mirror mountsTo enable mirrors to be mounted and correctly aligned to the motion system, Renishaw can also provide adjustable mounts for use with mirrors up to 350 mm in length, which have a cross section of 25 mm x 25 mm.

These mounts provide up to ±2.5° yaw adjustment and ±1° pitch adjustment. (Actual adjustment range is dependent on mirror length.)

Renishaw supplied mirror mounts are not vacuum compatible.

 

Zerodur® is a registered trademark of Schott Glass Technologies Incorporated.

后续步骤

如果您需要了解更多信息或者询价, 或有其他要求,可以直接联络当地的Renishaw办事处


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