超高真空 (UHV) 光栅

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UHV montage Renishaw UHV encoders are compatible with vacuum pressures as low as 10^-11 TORR. The RGH25F UHV encoder system works with RGS20-S tape scale for both linear and partial arc applications. The RGH20F UHV readhead works with the RESR angle encoder, to provide precision rotary feedback. TONiC™ UHV linear encoders and TONiC™ UHV rotary encoders are being added to the range from the second quarter of 2010.

The vacuum range is suitable for many applications including wafer handling/testing, scientific instruments, spectroscopy, vacuum inspection equipment and many more.

RGH25F UHV linear encoder		RGH20F UHV angle encoder		TONiC UHV linear encoder		TONiC UHV angle encoder

UHV readheads features and benefits

Constructed from vacuum-compatible materials and adhesives to give low outgassing rates and proven clean RGA
Bake-out temperature of 120°C
Non-contact open optical system offers high speed, reliable operation with zero friction and zero wear
Industry standard digital and analogue outputs with resolutions to 1 nm
Low power consumption minimises heat dissipation
Vented seals
Adaptive electronics offer high accuracy, long-term reliability and low cyclic error (±50 nm for RGH25F UHV and RGH20F UHV, ±30 nm for TONiC UHV)
RFI shielded cable with vacuum compatible coated wiring
TONiC UHV encoder features optical reference mark

Find out more...

RGH25F UHV vacuum compatible linear encoder
RGH20F UHV vacuum compatible rotary (angle) encoder
TONiC UHV vacuum compatible linear encoder
TONiC UHV vacuum compatible rotary (angle) encoder

Notice of obsolescence

Please note that the RGH25U and RGH25 UHV readheads and RGB interface are now obsolete and have been replaced by the RGH25F, RGH25F UHV and REF interface respectively.